M06200 - SEMI M62 - Specification for Silicon Epitaxial Wafers StdTpc-Stainless Steel Components SEMI T5 — Specification for

SEMI T5 — Specification for Alphanumeric Marking of Round Gallium Arsenide Wafers

It may also be used to characterize other materials exhibiting resistivity in this range

免責事項：

This Standard was technically approved by the Gases Global Technical Committee

SEMI MF1618 — Practice for Determination of Uniformity of Thin Films on Silicon Wafers

M06200 - SEMI M62 - Specification for Silicon Epitaxial Wafers StdTpc-Stainless Steel Components SEMI T5 — Specification for* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1