Hitachi EPDI-I PCB Card M-511E Microwave Plasma Etching System Working Spare This Tegal 99-385-001 is used

This Tegal 99-385-001 is used working surplus

The heater shows wear (see photos)

Part No: 2842S012C

BP201389-03

5080-192376-11 PIPE NP8148D025-2 2

Hitachi EPDI-I PCB Card M-511E Microwave Plasma Etching System Working Spare This Tegal 99-385-001 is usedHitachi EPDI I PCB Card M 511E Microwave Plasma Etching System Working Spare Inventory # 12340, AA 3209 Part No: EPDI I Removed from a Hitachi M 511E Microwave Plasma Etching System This Hitachi EPDI I PCB Card is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 8"x8"x8" @ 6 lbs. Only items