PV03500 - SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdTpc-Gases - Specialty and unambiguously

and unambiguously

SEMI S2-0703aE (editorial revision)

it doesn’t restrict specific means of writing

1-0703 (Reapproved 1109)

SEMI D20-93E (editorial revision)

PV03500 - SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdTpc-Gases - Specialty and unambiguouslyNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI A1. The purpose of this Standard is to provide a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones (equipment here includes process equipment, metrology equipment, transport equipment and clustered