E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded 本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2010年4月30日，global Audits and

本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2010年4月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年6月にwww

The scope of this Standard is to define WJOBJ which represents WJ

The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry

It covers both conventional metal face sealing and surface mount gas delivery systems

Elongation

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded 本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2010年4月30日，global Audits andThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions