E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded is essential to successful implementation

is essential to successful implementation of a wafer bonding process

2  Final assemblies should be evaluated according to the criteria of SEMI S2 for environmental

In addition to the information embodied in this Standard

as this information requires user input and is already specified by SEMI E58

or other related manufacturing equipment and supplier-provided support equipment to cover aspects of equipment acquisition

E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded is essential to successful implementationThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any