M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components Specification and Guide for Boron

Specification and Guide for Boron Trichloride (BCI3)

It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge

and specimen surface preparation specified in this Test Method are to be preferred for all referee measurements on bulk silicon wafers

SEMI M8-0703 (technical revision)

These characteristics and behaviors are required to be implemented

M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components Specification and Guide for Boronglobal Silicon Wafer Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org2001320053 1107 cm 1IOC 88 1,2 1970 Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF1188 Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption with Short Baseline