P04200 - SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様 StdPbc-0801 and NH4F aqueous solutions

and NH4F aqueous solutions

SEMI MF84-0312 (Reapproved 1023)

This standard was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee

mass flow controllers and meters

Ease of Use

P04200 - SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様 StdPbc-0801 and NH4F aqueous solutionsNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2009Japanese Regional Standards Committee20042www. semi. org20043 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain