E11300 - SEMI E113 - 半導体処理装置の高周波（RF）電力供給システム用仕様 StdTpc-Tubing Fittings & Valves This Specification describes the volume

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

To meet these specifications

SEMI E30-0997 (technical revision)

SEMI E47 — Specification for 150 mm/200 mm Pod Handles

SEMI D29-1101 (Reapproved 1113)

E11300 - SEMI E113 - 半導体処理装置の高周波（RF）電力供給システム用仕様 StdTpc-Tubing Fittings & Valves This Specification describes the volumeNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Metrics Global Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org20011120063 : (RF) RFRFRF RFRF RFRF RF (CVDPVD) RF Referenced SEMI Standards SEMI E10 Specification for Definition