T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded Now think about the different

Now think about the different types of hazardous energy used to operate that equipment

The accuracy of the critical dimensions of the notch controls the possible accuracy of the alignment

The measured conditions include the flat and the curved surface

1e12-1e13 C atoms/cm2

a fitting body temperature range of 23°C to 125°C (73°F to 257°F) should be maintained

T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded Now think about the differentNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI global Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org200511 EUV SEMI P37SEMI P386 6 Referenced SEMI Standards SEMI P37 Specification for Extreme Ultraviolet Lithography Mask Substrates SEMI P38