M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers StdPbc-1121 Chemical treatment of the silicon
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Description
Chemical treatment of the silicon surface may be required to produce a reliable Schottky barrier diode
Ca含量的测定方法。
SEMI MF1188-1107 (Reapproved 0718)
more specific standards describing particular FPUs and their services may evolve
1-1101 (technical revision)
M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers StdPbc-1121 Chemical treatment of the silicon
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