C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive SEMI E154 — Mechanical Interface

SEMI E154 — Mechanical Interface Specification for 450mm Load Port

and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods

원본은 1992년에 발행되었고

To accelerate improvements of packaged MEMS devices

determined by doping with carbon

C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive SEMI E154 — Mechanical InterfaceThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at www. semi. org in February 2006. Originally published 1978; previously published June 1999. NOTICE: This document was completely rewritten in 2006. The purpose of this document is to standardize requirements for dichloromethane (methylene