S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment StdPbc-1118 a front side dielectric antireflective

a front side dielectric antireflective layer and front side contacts on top

such as wafer carriers and wands

SEMI C28-0699 (first published - replaces SEMI C1

本基準提供一系列的選擇與說明，旨在協助讀者瞭解能源、電力及原料節約技術。本基準亦提供電力與原料使用率測量，以及將測量值換算成等效能源的方法建議。

The distributions can be based on a theoretical model or on empirical information obtained from manufacturing data

S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment StdPbc-1118 a front side dielectric antireflectiveThis Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety