F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors StdPbc-0709 SEMI MF1391 –– Test Method

SEMI MF1391 –– Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption

これらスタンダードは，プロセスツールポートに関する機械的特徴について規定し，また，ツールの前面ないし表面の特徴についても規定する。これら特徴は，特定の機能のためであるが，特定機能のための設計要求事項を定めるものではない。このインタフェース要求事項は普遍的なものであり，ある特定の搬送様式を奨励することを避けている。したがって，プロセスツールポートと，コンベヤのような連続した直接

Also they can transfer to wafers by direct contact or be left behind from solvent residues

SEMI E99-0317 (technical revision)

The additional GEM capabilities provide functionality required for some types of factory automation or functionality applicable to specific types of equipment

F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors StdPbc-0709 SEMI MF1391 –– Test MethodThis specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on April 22, 2004. Initially available at www. semi. org June 2004; to be published July 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.