F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive SEMI MF1392-0307 (Reapproved 0512)

SEMI MF1392-0307 (Reapproved 0512)

and Iron on Silicon and EPI Substrates by Secondary Ion Mass Spectroscopy

本文書は，装置自体，他の装置，製品または設備に損傷をもたらす恐れのある主題の装置に発生する火災リスクに適用される。

Czochralski technique or other controlled solidification methods

specimen preparation

F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive SEMI MF1392-0307 (Reapproved 0512)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings, after they have been subjected to an elevated ambient temperature and cooled to room temperature (hereafter