E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment 규약 및 표기법을 제공한다

규약 및 표기법을 제공한다

the user of this Document can generate specifications for silicon annealed wafers

monitoring or qualifying product for purchase or sale or internal use

Seven region of the world are covered in this summary including North America

Changes were made to ¶ 7

E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment 규약 및 표기법을 제공한다1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this