F01500 - SEMI F15 - 筐体の試験方法（六フッ化硫黄のトレーサガス）のSEMI S6への移行 Revision:SEMI F15-0308 (Withdrawn 1011) - Withdrawn 5 × 1015 cm 3

5 × 1015 cm 3 at cryogenic temperatures (below 80 K)

Specification will include detailed data structures in the form of inheritance and aggregation models that are common to all PCS FGs

This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user

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SEMI D77-0618 (Reapproved 0224)

F01500 - SEMI F15 - 筐体の試験方法（六フッ化硫黄のトレーサガス）のSEMI S6への移行 Revision:SEMI F15-0308 (Withdrawn 1011) - Withdrawn 5 × 1015 cm 3global Environmental Health & Safety Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org199320083 2011 SEMI F15SEMI S62 Referenced SEMI Standards SEMI F15 93 (Reapproved 1104) Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography SEMI S6 EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment