TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Perforated Lithius SPATIAL FILTER CNTRL

SPATIAL FILTER CNTRL

Model No: KT002155-04

img{max-width:100%} Air Products AP1552 4

Part No: FC-780XC

Inventory # K-7165

TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Perforated Lithius SPATIAL FILTER CNTRLTEL Tokyo Electron 5087 400391 12 ARM R COT Scan Assembly Perforated Lithius Inventory # A 18745 Part No: 5087 400391 12 Model No: SCAN ASSY ARM R COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Installed Components Sanyo Denki Stepping Motor Part No: 103H7851 70E1, StepSyn SMC Linear Actuator Part No: LG 96A A1 Parts List (approximation, parts may vary) Assembly Part No: 5087 400391 12 SCAN ASSY 5024 000118 11