E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 • Equipment and load port

• Equipment and load port access mode switching

000 defects per cm2

5-1104 (technical revision)

Operating problems and additional product defects due to static charge can have a negative impact on the cost of ownership (COO) of semiconductor manufacturing equipment (refer to SEMI E35)

This standard was technically approved by the global Flat Panel Display – Factory Automation Committee

E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 • Equipment and load portThis standard was technically approved by the global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1992; last published June 1999. NOTICE: This document was