F11400 - SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1114 This marking symbol is marked

This marking symbol is marked in a manner and location to avoid affecting the user patterning process

it is very necessary to establish the standard for PSS products

1  This Specification defines inspection and acceptance criteria for GTA autogenous butt joint welds of stainless steel and other CRAs in fluid distribution systems

which can be commonly used independently to the suppliers and models of exposure equipment

SEMI MF397-0812 (Reapproved 0718)

F11400 - SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1114 This marking symbol is markedThis Document defines a test method for determining organic compounds on the wetted surfaces of ultra high purity (UHP) chemical delivery systems and components. This Test Method is applicable to UHP chemical delivery systems and components. Examples of test samples include valves, regulators, filters, and mass flow controllers, tubing, weld fittings, and face seal fittings. This Test Method could also be used to determine the contamination