G00300 - SEMI G3 - 仕様 側面ろう付け積層板 Revision:SEMI G3-90 - Inactive SEMI E114-0302E (Reapproved 0923)
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Description
SEMI E114-0302E (Reapproved 0923)
本文書の目的は,半導体産業で使用されるシラン(SiH4)の仕様を提供するものである。
This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19
本ガイドラインは,ポジレジスト(positive photoresist)を意図している。
resonators
G00300 - SEMI G3 - 仕様 側面ろう付け積層板 Revision:SEMI G3-90 - Inactive SEMI E114-0302E (Reapproved 0923)CurrentInactiveInactiveSEMI 7. 62 mm (0. 003 in.)10. 16 mm (0. 400 in.)15. 24 mm (0. 600 in.)22. 86 mm (0. 900 in.) Referenced SEMI Standards None.
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