Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution not-for-sale EN 1514‑6 and prEN 1514-8

EN 1514‑6 and prEN 1514-8

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution not-for-sale EN 1514‑6 and prEN 1514-81 Scope This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X ray photoelectron spectrometers under defined settings. The straight edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 m. The grid method is suitable if the lateral resolution is expected to be less than 1 m but more than 20 nm. The gold island method is