P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - Inactive 2-0698 (Reapproved 0706)

2-0698 (Reapproved 0706)

4  This Guide also describes the different temperature regions of an internal feeder and the temperature limits of the materials used in each region

this Specification intends neither to exclude nor to limit the possibility that suppliers and end-users might test with chemicals other than UPW or with other temperature conditions and

SEMI F27-0997 (first published)

慣例単位は参考目的のみのために括弧内に併記され，最も近い数値に丸められてきた。

P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - Inactive 2-0698 (Reapproved 0706)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004816North American Regional Standards Committee20049www. semi. org200411 1994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the